A validated modeling strategy for piezoelectric MEMS loudspeakers including viscous effects

Piezoelectric micro-electro-mechanical system (MEMS) loudspeakers are drawing more interest due to their applications in new-developing audio technologies. MEMS devices’ small dimensions necessitate including thermal and viscous effects the surrounding air when simulating behaviors. Thus, linearized mass, momentum energy conservation equations used describe these effects. These formulations implemented our open-source finite element program openCFS. In this article, we model a 3D piezoelectric loudspeaker two configurations: open closed back-volume, which behave differently of viscosity pressure forces between cantilever back-volume. Furthermore, using customized vacuum chamber, atmospheric is varied its studied configurations, numerically experimentally. Experimental results prove that predicts behavior various configurations very well. Additional simulations illustrate effect slit thickness losses.